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Blank Mask Inserter (Turret Type)
- Realizes low-vibration, low-particle diffusion and high speed transfer by employing a turret table.
- Inserts blanks directly into the masks by recognizing the mask insertion point using image recognition.
- Enables a sequential supply and retrieval of blank trays.
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Blank Mounter
- Equipped with dispenser temperature control function, 0-point needle height detecting function, and dispensing position feed-back function. Also stabilizes dispensing volume and high accuracy dispensing position.
- Realizes loading accuracy at ±0.03mm.
- Compatibility with connecting In-Line system to the post process (Clean Curing Oven by Akim).
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Blank Mounter (High Speed Type)
- Employs a turret table to facilitate high speed transfer for packages and blanks.
- Equipped with dispenser temperature control function, 0-point needle height detecting function, and dispensing position feed-back function. Also stabilizes dispensing volume and high accuracy dispensing position. Includes an option to enable package height measurement and dispensing height correction via razor displacement meter.
- Realizes loading accuracy at ±0.015mm via newly developed image recognition method and low vibration.
- Includes a special supply function by snapping off from wafer of AT plate or tuning fork blank.
- Compatibility with connecting In-Line system to the post process (Clean Curing Oven by Akim).
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Blank Mounter (Reverse Rotating Turret Type)
- Delivers precise dispensing resulting from less restriction by needｌe shape, as compared to dispensing on cavity shape packages.
- Enables user to use normal air pulse type dispensers, as it is possible to dispense bond from the upper direction following inverting blanks.
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Clean Curing Oven
- Cures bonds in a clean atmosphere (Class 100)
- The injection of N2 gas into the oven protects products and conductive bonds from oxidization (oxygen concentration : less 100ppm)
- Consists of 4-block heating zones allowing for each line to be independently contorlled. This enables the achievement of the desired temperaturee profile.
- Enaables rapid tempeerature rise via the supply of carriers directly into the inside of oven. This prevents film from forming on the surface of the conductive bond and prevents void generated by residual soslvent.
- Reduces equipment width by employing a 2-line carrying mehod.
- Facilitates cleaning of the inside of oven through a resractable upper oven body.
- Connects the In-line system to the pre and post processes.
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Lid Tacking Machine
- Loads lids with high speed and high accuracy by employing a turret table.
- Enables improved maintainability and decreases the amount of N2 by performing lid tacking in the atmosphere.
- Compatibility with connecting In-Line system to Vacuum Anneal Machine and Vacuum Seam Machine.
- Enables user to perform Front/Rear judging for lids by parts feeder.(optional）
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Vacuum Annealing Machine
- Compatibility by connecting In-Line system to preceding processes enabling user to perform process by a unit of 1 piece tray.
- Anneals ceramic packages under high vacuum conditions of 1.1 x 10-3Pa.
- Heats for 60 minutes at maximum temperature of 300℃.
- Transfer jigs accommodate both standard trays and clamp carriers.
- Sets up buffer stocker for stopping time on the post process at the inside of the vacuum chamber.
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Dual Axis Vacuum Seam Welding Machine
- Performs seam sealing on ceramic packages under high vacuum conditions of 1.1 x 10-3Pa
- Conserves running cost of N2 (up to 200-300K JPY per month).
- Accommodates standard transfer jigs (174 x 134 mm)
- Contributes to the maintenance of operations rates by providing automated electrode roller exchanging function.
- Improves the detection of abnormalities by welding current monitoring function.
- Attains rapid recovery from a shutdown due to power failure by employing a turbo molecular pump for the main vacuum pump.
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N2 Seam Welding Machine
- Loads lids with high speed and high accuracy by employing a turret table.
- Enables user to perform seam welding on one side of a lid via roller electrodes for a lid tacking device.
- Accommodates standard transfer jigs (174 x 134 mm).
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Vacuum Seam Welding Machine (Single Type)
- Performs seam sealing on X side of ceramic packages under high vacuum conditions of 1.1 x 10-3Pa
- Conserves running cost of N2 (up to 200-300K JPY per month).
- Contributes to the maintenance of operations rates by providing automated electrode roller exchanging function.
- Improves the detection of abnormalities by welding current monitoring function.
- Attains rapid recovery from a shutdown due to power failure by employing a turbo molecular pump for the main vacuum pump.
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TH_Xtal Temperature Characteristics Inspecting Machine (Turret Type)
- Performs high speed and accurate temperature control by utilizing the Peltier temperature control plate.
- Performs all processes from supplying parts (temperature characteristics inspection) to retrieving parts.
- Enables users to select a temperature set up to 5-point.
- Minimizes space and saves electric power when compared to the normal constant temperature chamber.
- Having no socket board reduces the need to design new functions for additional versions.
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Inspection, Marking and Taping Machine
- Realizes high speed and low vibration transfer by employing a turret table.
- Enables users to exchange nozzles easily by employing a leaning structure for the turret table.
- Enables user to perform accurate and reliable measurements even for the high frequency products by using a structure in which the measuring probe is being tightened.
- New taping machine is designed to concentrate to enable high speed transfer and high accuracy positioning.
