Blank Mask Inserter (Turret Type)

Blank Mask Inserter (Turret Type)

Control No
  • AKV601A
  • Patent No4876230
  • Patent No4829262

Model No.

ABMI860

Descriptions

This system inserts crystal blanks, extracted from the supply tray with corrected images, into the sputtering masks.

Features

  • Realizes low-vibration, low-particle diffusion and high speed transfer by employing a turret table.
  • Inserts blanks directly into the masks by recognizing the mask insertion point using image recognition.
  • Enables a sequential supply and retrieval of blank trays.

Specification

Compatible Works blanks of crystals * Enables to accommodate polished blanks (transparent)
Insertion Method direct insertion method
Cycle Time 0. 6 sec. per pc.
Outer Dimension W900XD850XH1750㎜ (excludes monitor and indicating light)
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