Blank Mask Inserter (Turret Type)
- Control No
-
- AKV601A
-
- Patent No4876230
- Patent No4829262
Model No.
ABMI860
Descriptions
This system inserts crystal blanks, extracted from the supply tray with corrected images, into the sputtering masks.
Features
- Realizes low-vibration, low-particle diffusion and high speed transfer by employing a turret table.
- Inserts blanks directly into the masks by recognizing the mask insertion point using image recognition.
- Enables a sequential supply and retrieval of blank trays.
Specification
Compatible Works | blanks of crystals * Enables to accommodate polished blanks (transparent) |
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Insertion Method | direct insertion method |
Cycle Time | 0. 6 sec. per pc. |
Outer Dimension | W900XD850XH1750㎜ (excludes monitor and indicating light) |